A very interesting field within the world of nanoscience is the nanotube area. One route to obtain well-ordered arrays of nanotubes is to use a template and transfer the pattern to a desired material. A suitable template for this method is anodic aluminium oxide (AAO), which can be electrochemically grown and exhibits a high degree of order over large areas. A problem is that few deposition techniques are able to conformally cover the pore-walls of the AAO. However, ALD is a very well suited technique for the template deposition method.

For all metal oxides, well-ordered and free-standing nanotubes with aspect ratios up to 35 could be fabricated in the in-house made AAO templates. In commercial templates, aspect ratios of 200 was achieved. From SEM and TEM studies it could be seen that the pore-walls of the AAO were conformally covered, with the same oxide thickness regardless of the depth. This indicates that the duration of the pulses were sufficient to saturate the entire surface of the pore walls.

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1. Atomic Layer deposition of iron oxide nanotubes