A method to fabricate carbon branched nanostructures arrays is presented. We employ the electron-beam-induced deposition method using a transmission electron microscope in poor vacuum conditions where hydrocarbons are present in the chamber. The hydrocarbons are attracted to the substrates by the local electric fields. The process can be monitored in real time at the nanoscale level. Saw-tooth nano-patterns were made with a focused ion beam in porous silicon substrates with high porosity in order to create sites with high local electric fields. We found that the adequate ion dose to create well defined saw-tooth nano-patterns was between 2 and 8 nC/mm². Micro Raman studies for the branched nanostructures showed two sharp peaks near 1500 cm^-1 and 1350 cm^-1 which are consistent with the G and D peaks of amorphous carbon. Electron energy loss spectroscopy in the high loss region confirms this assignment. Raman and energy-loss near-edge structure were compared in terms of sp²/sp³ calculations. Selected area electron diffraction, high resolution images and energy dispersive X-ray analysis are also presented.

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