A New Single layer antireflection coating on PET substrates for the Display applications

Gowtham Manoharan ,  Bojan Karunagaran ,  Devanesan Mangalaraj ,  Chang Ki Seo ,  Myung Suk Shim ,  Jinsu Yoo ,  Junsin Yi 

Sungkyunkwan University, School of Information and Communication Engineering, 300 Chunchun-dong, Jangan-gu, Suwon 440746, Korea, South


Single layer antireflection coating(SARC) is found to be the alternate for the current multilayer antireflection coatings . Titanium Nitride(TiN)is found to be appropriate for its good mechanical properties and optical properties. Recently very thin TiN films were found as an antireflection(AR) and antistatic(AS) layer for display applications. TiN films are fabricated by r.f. magnetron sputtering and the optical, electrical and compositional properties were investigated. The oxygen content is found in the XPS measurements revealed that our TiN films were actually titanium oxynitiride (TiNx Oy) which is found to play an important role in AR properties .The optical properties TiNxOy films usually vary with the stoichiometry and crystallinity . so the experiment is carried out for different ratios of Ar/ N2 to vary the optical property of the film. Spectroscopic ellipsometer (SE MF-1000) and UV-Vis spectrophotometer (SCINCO) were used for the optical measurements such as refractive index , transmittance and reflectance measurements.

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Presentation: oral at E-MRS Fall Meeting 2004, Symposium C, by Gowtham Manoharan
See On-line Journal of E-MRS Fall Meeting 2004

Submitted: 2004-04-30 08:46
Revised:   2009-06-08 12:55
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