Microsystem Technology as a Road from Macro to Nano-world. New Opportunities Created by National Centre of Silicon Micro- and Nanotechnology.

Piotr Grabiec ,  Krzysztof Domański ,  Paweł Janus ,  Michał Zaborowski 

Institute of Electron Technology (ITE), al. Lotników 32/46, Warszawa 02-668, Poland

Abstract

Tremendous progress of microelectronic technology observed within last 40 years is closely related to even more remarkable progress of technological tools. It is important to note however, that these new tools may be used for fabrication of diverse multifunctional microstructures as well. Such devices, called MEMS and MOEMS microsystems integrate microelectronic and micromechanical structures in one system enabling interdisciplinary application, with most interesting and prospective being bio-medical investigations. Development of these applications requires however co-operation of multidisciplinary team of specialists, covering broad range of physics, (bio) chemistry and electronics, not mentioning medical doctors and other medical specialists. Thus, dissemination of knowledge about existing processing capabilities is of key importance. In this paper examples of various applications of microelectronic technology for fabrication of Microsystems which may be used for medicine, will be presented. Besides, information concerning a National Silicon Micro- and Nanotechnology centre being created in Insttute of Electron Technology in Warsaw and new, emerging opportunities will be given. Emphasize will be put on areas of possible cooperation with focus on surface chemistry.

Legal notice
  • Legal notice:

    Copyright (c) Pielaszek Research, all rights reserved.
    The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
    In every case, proper references including Author(s) name(s) and URL of this webpage: http://science24.com/paper/1184 must be provided.

 

Related papers
  1. Impact of the structural funds (POIG) initiative on microsystem technology development in Poland (MINTE and MNS-DIAG projects)
  2. Surface properties of silicone rubber for sensor applications

Presentation: Keynote lecture at SMCBS 2003 Workshop, by Piotr Grabiec
See On-line Journal of SMCBS 2003 Workshop

Submitted: 2003-08-08 00:28
Revised:   2009-06-08 12:55
Google
 
Web science24.com
© 1998-2022 pielaszek research, all rights reserved Powered by the Conference Engine