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Microsystem Technology as a Road from Macro to Nano-world. New Opportunities Created by National Centre of Silicon Micro- and Nanotechnology.

Piotr Grabiec ,  Krzysztof Domański ,  Paweł Janus ,  Michał Zaborowski 

Institute of Electron Technology (ITE), al. Lotników 32/46, Warszawa 02-668, Poland


Tremendous progress of microelectronic technology observed within last 40 years is closely related to even more remarkable progress of technological tools. It is important to note however, that these new tools may be used for fabrication of diverse multifunctional microstructures as well. Such devices, called MEMS and MOEMS microsystems integrate microelectronic and micromechanical structures in one system enabling interdisciplinary application, with most interesting and prospective being bio-medical investigations. Development of these applications requires however co-operation of multidisciplinary team of specialists, covering broad range of physics, (bio) chemistry and electronics, not mentioning medical doctors and other medical specialists. Thus, dissemination of knowledge about existing processing capabilities is of key importance. In this paper examples of various applications of microelectronic technology for fabrication of Microsystems which may be used for medicine, will be presented. Besides, information concerning a National Silicon Micro- and Nanotechnology centre being created in Insttute of Electron Technology in Warsaw and new, emerging opportunities will be given. Emphasize will be put on areas of possible cooperation with focus on surface chemistry.


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Presentation: Keynote lecture at SMCBS 2003 Workshop, by Piotr Grabiec
See On-line Journal of SMCBS 2003 Workshop

Submitted: 2003-08-08 00:28
Revised:   2009-06-08 12:55