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- Wonseok Yoo

e-mail:
phone: +82-31-2082020
fax: +82-31-2080699
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interest(s):

Affiliation:


SAMSUNG ELECTRONICS CO. LTD.

address: , Hwasung, 445-701, Korea, South
phone:
fax:
web:

Participant:


17th International Conference on Crystal Growth and Epitaxy - ICCGE-17

began: 2013-08-11
ended: 2013-08-16
Presented:

17th International Conference on Crystal Growth and Epitaxy - ICCGE-17

The effect of boron concentration on facet formation in in-situ doping silicon selective epitaxial growth

Publications:


  1. The effect of boron concentration on facet formation in in-situ doping silicon selective epitaxial growth



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