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dr Erwin Kessels
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| e-mail: | ***@tue.nl |
| phone: | +31-40-2473477 |
| fax: | +31-40-2456442 |
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| interest(s): | |
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Affiliation: |
Eindhoven University of Technology
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| address: | P.O. Box 513, Eindhoven, 5600MB, Netherlands | | phone: | | | fax: | | | web: | http://www.tue.nl | |
Participant: |
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Publications: |
- Remote plasma ALD of oxides and nitrides: fundamentals and applications
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