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prof Roy G. Gordon

e-mail:
phone: +001-617-4954017
fax: +001-617-4954723
web:
interest(s):

Affiliation:

Harvard University

address: 12 Oxford Street, Cambridge, MA, 02138, United States
phone: +001-617-4954017
fax: +001-617-4954723
web: http://www.chem.harvard.edu/groups/gordon/roygordon.html

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
ALD of High-k Dielectrics and Metals

Publications:
  1. ALD of High-k Dielectrics and Metals



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