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prof Romuald Beck
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+48-22-2347888
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Affiliation:
Warsaw University of Technology, Institute of Microelectronics & Optoelectronics
address:
Koszykowa 75, Warszawa, 00-662,
Poland
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fax:
web:
http://www.imio.pw.edu.pl/
Participant:
Nano2business workshop
began:
2007-02-07
ended:
2007-02-09
Presented:
Publications:
Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD
Si-oxide and Si-oxynitride interfaces analysed by ultra-low energy SIMS
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