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prof Romuald Beck

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phone: +48-22-2347888
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interest(s):

Affiliation:


Warsaw University of Technology, Institute of Microelectronics & Optoelectronics

address: Koszykowa 75, Warszawa, 00-662, Poland
phone:
fax:
web: http://www.imio.pw.edu.pl/

Participant:


Nano2business workshop

began: 2007-02-07
ended: 2007-02-09
Presented:

Publications:


  1. Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD
  2. Si-oxide and Si-oxynitride interfaces analysed by ultra-low energy SIMS




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