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dr Matti Putkonen
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| e-mail: | ***@beneq.com |
| phone: | +358-40-5203099 |
| fax: | +358-9-75995310 |
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| interest(s): | |
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Affiliation: |
Beneq Oy
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| address: | Ensimmainen Savu, Vantaa, 01510, Finland | | phone: | +358-9-7599530 | | fax: | +358-9-75995310 | | web: | http://www.beneq.com | |
Participant: |
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Publications: |
- Atomic layer deposition as a tool for tailoring adhesion properties of interfaces.
- Low temperature ZnMnO by ALD
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