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prof Lauri Niinistö
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phone:
+358-50-5595302
fax:
+358-9-462373
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Affiliation:
Helsinki University of Technology, Laboratory of Inorganic and Analytical Chemistry
address:
P.O. Box 6100, Espoo, 02015,
Finland
phone:
fax:
web:
Participant:
E-MRS Fall Meeting 2007
began:
2007-09-17
ended:
2007-11-30
Presented:
E-MRS Fall Meeting 2007
Exploiting novel precursor chemistry for the growth of oxide thin films by Atomic Layer Deposition
Publications:
Exploiting novel precursor chemistry for the growth of oxide thin films by Atomic Layer Deposition
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