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dr Jörg Hofmann
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phone:
+49-341-2352815
fax:
+49-341-2352815
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interest(s):
Affiliation:
Institut für Nichtklassische Chemie
address:
Permoserstraße 15, Leipzig, 04318,
Germany
phone:
+49-341-2352214
fax:
+49-341-2352701
web:
http://www.uni-leipzig.de/inc
Participant:
COST action D32 Mid term evaluation meeting
began:
2006-06-07
ended:
2006-06-09
Presented:
COST action D32 Mid term evaluation meeting
Application of Ultrasound in the Wafer Fabrication: 1) Development of an Ozone Detector and 2) Degasification of Process Water
Publications:
Application of Ultrasound in the Wafer Fabrication: 1) Development of an Ozone Detector and 2) Degasification of Process Water
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