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- Yan-Kai Chiou

e-mail:
phone: +886-3-5719454
fax: +886-3-5751979
web:
interest(s):

Affiliation:

Department of Materials Science and Engineering, National Tsing Hua University

address: 101, Sec 2, Kuang-Fu Road, Hsinchu, 30013, Taiwan
phone: +886-3-5715131
fax: +886-3-5722366
web: http://www.nthu.edu.tw/

Participant:

E-MRS Fall Meeting 2006

began: 2006-09-04
ended: 2006-09-08
Presented:
E-MRS Fall Meeting 2006
A comparative studies of atomic-layer-deposited Hf-based thin films for high-k gate dielectric applications

Publications:
  1. A comparative studies of atomic-layer-deposited Hf-based thin films for high-k gate dielectric applications



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