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Hong-Ying Chen

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phone: +886-4-22840500
fax: +886-4-22857017
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Affiliation:

Department of Materials and Science, National Tsing Hua University

address: , Hsinchu, , Taiwan
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Participant:

E-MRS Fall Meeting 2004

began: 2004-09-06
ended: 2004-09-10
Presented:
E-MRS Fall Meeting 2004
Argon ion beam voltages influence the changes of microstructure and chemical composition of aluminum nitride films in dual ion beam sputtering system

Publications:
  1. Argon ion beam voltages influence the changes of microstructure and chemical composition of aluminum nitride films in dual ion beam sputtering system



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