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tilo baumbach
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Affiliation:
Forschungszentrum Karlsruhe, Institut für Nanotechnologie
address:
Herrmann-von-Helmholtz-Platz 1, Karlsruhe, 76344,
Germany
phone:
+497247826377
fax:
+497247826368
web:
Participant:
E-MRS Fall Meeting 2003
began:
2003-09-15
ended:
2003-09-11
Presented:
E-MRS Fall Meeting 2003
X-ray imaging of semiconductor micro- and nanostructures in real and reciprocal space
Participant:
E-MRS Fall Meeting 2004
began:
2004-09-06
ended:
2004-09-10
Presented:
E-MRS Fall Meeting 2004
X-ray imaging for applied and industrial research - applications in microelectronics and in micro system technology
Publications:
X-ray imaging for applied and industrial research - applications in microelectronics and in micro system technology
X-ray imaging of semiconductor micro- and nanostructures in real and reciprocal space
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