Search for content and authors |
|
|
 |
Patrick Hoffmann
e-mail: | ***@tu-cottbus.de |
phone: | |
fax: | |
web: | |
interest(s): | |
|
Affiliation: |
Brandenburg Technical University |
Affiliation: |
Brandenburg Technical University, Department of Applied Physics/Sensorics |
Participant: |
|
Publications: |
- Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD
|