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Patrick Hoffmann
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Affiliation:
Brandenburg Technical University
address:
Erich Weinert Str. 1, Cottbus, 03044,
Germany
phone:
fax:
web:
http://www.physik.tu-cottbus.de/physik/ap2/
Affiliation:
Brandenburg Technical University, Department of Applied Physics/Sensorics
address:
Erich Weinert Str. 1, Cottbus, 03044,
Germany
phone:
fax:
web:
http://www.physik.tu-cottbus.de/physik/ap2/
Participant:
E-MRS Fall Meeting 2003
began:
2003-09-15
ended:
2003-09-11
Presented:
E-MRS Fall Meeting 2003
Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD
Publications:
Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD
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