Markku Leskela

Affiliation:

Department of Chemistry, University of Helsinki

Participant:

E-MRS Fall Meeting 2003

Participant:

E-MRS Fall Meeting 2007

Publications:

1. ALD metal fluoride thin films for UV optics
2. ALD of TiO₂ based photocatalysts
3. ALD of ZrO₂ Thin Films Exploiting Novel Mixed Alkylamido-Cyclopentadienyl Precursors
4. Atomic Layer Deposition of Oxide Dielectric Films for Microelectronics
5. Conduction mechanisms in nanolaminates and mixture films grown by atomic layer deposition
6. Growth of CdS - PbS nanotructured double films on silicon substrate by SILAR techniques