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Yuri S. Kovalev |
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Affiliation: |
Institute of Spectroscopy RAS|
| address: | , Troitzk, , Russian Federation | | phone: | | | fax: | | | web: | | |
Affiliation: |
Joint Institute for Nuclear Research|
| address: | , Dubna, , Russian Federation | | phone: | | | fax: | | | web: | | |
Publications: |
- TRANSFORMATION OF SILICON WAFER SURFACE UNDER LOW-ENERGY HYDROGEN ION-BEAM TREATMENT
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