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Serguei V. Chigir

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Affiliation:

Belarusian State University

address: F. Skaryna av. 4, Minsk, 220050, Belarus
phone: 375-29-6277495
fax: 375-17-2095267
web:

Publications:
  1. TRANSFORMATION OF SILICON WAFER SURFACE UNDER LOW-ENERGY HYDROGEN ION-BEAM TREATMENT



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