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Teet Uustare
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Affiliation:
Institute of Physics, University of Tartu
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Riia str. 142, Tartu, 51014,
Estonia
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Publications:
Atomic layer deposition of crystalline Al
2
O
3
thin films
X-ray absorption spectroscopy as a method for structural study of HfO
2
and ZrO
2
thin films
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