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Matti Putkonen

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Affiliation:

Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo

address: , Helsinki, , Finland
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Publications:
  1. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics
  2. ZnMnO Films grown by Atomic Layer Deposition with uniform Mn distribution



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