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M. Cuch
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Affiliation:
Warsaw University of Technology, Institute of Microelectronics & Optoelectronics
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Koszykowa 75, Warszawa, 00-662,
Poland
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http://www.imio.pw.edu.pl/
Publications:
Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD
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