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Dieter Schmeisser
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Affiliation:
Brandenburg Technical University, Department of Applied Physics/Sensorics
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Erich Weinert Str. 1, Cottbus, 03044,
Germany
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http://www.physik.tu-cottbus.de/physik/ap2/
Publications:
Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD
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