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Sigitas Tamulevičius
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Affiliation:
Kaunas University of Technology, Institute of Physical Electronics
address:
Savanoriu 271, Kaunas, LT-3009,
Lithuania
phone:
+370 37 313432
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+370 37 314423
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Publications:
Effect of deposition conditions and annealing on residual stress of ITO films magnetron sputtered on silica
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