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Bonifacas Vengalis
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Affiliation:
Semiconductor Physics Institute
address:
A.Gostauto 11, Vilnius, LT-2600,
Lithuania
phone:
(3702)627124
fax:
(3702)627123
web:
http://www.pfi.lt
Publications:
Effect of deposition conditions and annealing on residual stress of ITO films magnetron sputtered on silica
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