We present recent XRD results on the residual stress state and fiber texture of Ti60Al40N thin films grown on WC-Co, tool steel and high-speed steel substrates using arc-evaporation method. Reciprocal space maps around 002 TiAlN reflection revealed a subtle oscillatory behavior of the lattice spacing versus curves, which seems to be dependent on the magnitude of the stresses in the films. Pole figure XRD measurements have demonstrated that the fiber texture of the films is {311} and that their crystalline structure deviates from the ideal B1-fcc structure of TiN. Consequently, using the general elastic theory for textured materials, the anisotropic behavior of the 002 TiAlN reflection was attributed to the distorted lattice of the {311} oriented films.

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