Atmospheric pressure CVD is an attractive process for on-line strip coating of metal pieces. Moreover, the use of metal organic compounds as molecular precursors allows deposition at low temperature, which extends the applications of the process on various steels. We have developped an atmospheric MOCVD process assisted by Direct Liquid Injection for performing metallurgical coatings. This delivrery system permits accurate, constant and high flow rates of precursor, compared to conventional vaporization and transport method, i.e. using bubblers, especially when the metal organic precursor exhibits a low volatility as a powder. We present for the first time the deposition of nanocrystalline chromium carbide (Cr-C) and chromium nitride (CrN) films. CrN/Cr-C multilayer coatings with a typical 25 nm period were grown on stainless steel using alternatively addition of NH3. The main chemical, physical and structural characteristics of these metallurgical coatings have been investigated, as deduced from XRD, SEM, TEM, EPMA and SIMS. Preliminary mechanical properties from scratch test, nanoindentation and residual stress measurements as well as tribological behavior of the mono and multilayer Cr-based coatings are discussed in relation with their microstructure.

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