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Auger Electron Spectroscopy studies of the microstructure and diffusion processes at interfaces of multilayer platings used in laser diode technology
|Valentina V. Arbenina 1, R H. Akchurin 1, A A. Marmalyuk 2, O I. Govorkov 3|
1. Moscow State Academy of Fine Chemical Tecnology by M. V. Lomonosov, Vernadskogo pr., 86, Moscow 119571, Russian Federation
In modern technology of the laser diode fabrication, based on heterostructures AlGaAs/GaAs, metallic multilayer plating for contact platform is used. Each of formed layers with the thickness of the order 500-1000 A executes the certain function.
Presentation: poster at E-MRS Fall Meeting 2003, Symposium B, by Valentina V. Arbenina
See On-line Journal of E-MRS Fall Meeting 2003
Submitted: 2003-05-11 12:50 Revised: 2009-06-08 12:55