Spinel CuIn₅S₈ and AgIn₅S₈ materials are perspective for application in optoelectronic semiconductor devices. For the first time, thin films of these compounds were grown and investigated. The films were deposited by sequential process on Mo-coated soda lime glass. This process consist of sulfur vapor sulfurization of a metallic alloy precursor. We found that good adhesion to the substrate (Mo-coated glass) could be achieved by introducing a Ti layer between the substrate and the spinel layer. We observed a good electrical conductivity through this contact. From analysis of the XPS data, the information about the interface spinel/Ti and composition of the surface was gained. The influence of preparation conditions, namely of the phase composition of the precursor alloy, of the sulfurization temperature and time on the stoichiometry in the bulk and at the surface of the spinel layers have been investigated by XRD, XRFA and XPS methods. Moderate roughness of the films and a crystallite size of about 300-400 nm were observed in the AFM images.

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