Superlattice films made of TiN, CrN, NbN nitrides deposited on n-type single crystal silicon without or with interlayers of silicon dioxide or silicon nitride were studied. The superlattice films with thickness below 200 nm were deposited by PVD technique.
The Atomic Force Microscopy was used to study surface topography and tribological (friction and wear) behaviours and Hysitron`s TriboIndenter for nanomechanical tests by indentation technique.
The effect of the design of the superlattice film on its surface morphology and mechanical/tribological behaviours was identified.
The studied films seems to be very good candidates to be applied on rubbing elements of Micro Electro Mechanical Systems (MEMS) or AFM cantilever tips working in contact mode to prevent them against wear.

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