Search for content and authors
 

Epitaxial growth of SmFe7 films on Ta-buffered sapphire substrate using the RF magnetron sputtering method

Takeshi Kusumori ,  Kenta Takagi ,  Hiroyuki Nakayama ,  Mizue Mizoshiri ,  Kimihiro Ozaki 

National Institute of Advanced Industrial Science and Technology (AIST), 2266-98 Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan

Abstract

   Rare-earth-based iron-rich compounds are important industrially in high-performance magnets used in the motors of hybrid and electric vehicles. Following the discovery of Nd-Fe-B magnets there has been intensive pursuit of new permanent magnets based on rare-earth-iron systems. Sm-Fe-N compounds, which are produced mainly as powder, are promising materials because of their higher Curie temperature than Nd-Fe-B magnets. To investigate their magnetic properties and how they have superior characteristics as permanent magnets, single crystals or epitaxial films are necessary.
   We report here the fabrication of epitaxial films of SmFe7, which is a starting alloy for Sm-Fe-N permanent magnets with TbCu7-type crystal structure, upon Ta-buffered sapphire substrates. These films were prepared by the RF magnetron sputtering method, using Sm and Fe targets for SmFe7 films and Ta target for Ta buffer layers. The substrate temperature during film deposition was maintained at 400°C. The thickness of the SmFe7 and Ta layers were respectively about 40 nm and 360 nm.
   The orientation of the films relative to the substrate was examined by XRD measurements. XRD spectra from 2 theta-omega scanning indicate that SmFe7 (0001) films and the Ta (111) buffer layer grow normal to the sapphire (0001) substrate surface. Phi scanning measurements show 6-fold symmetry of (11-21) diffraction lines for hexagonal SmFe7, 3-fold symmetry of (22-2) diffraction lines for cubic Ta, and 3-fold symmetry of (10-14) diffraction lines for rhombohedral sapphire, indicating epitaxial growth of the Ta buffer layer and SmFe7 film.
   We undertook TEM observations of cross-sections of the films. SmFe7 grains grew in a columnar manner. Precipitation of α-Fe was found in the film, due presumably to Fe-enhanced deviation from the stoichiometric ratio. An amorphous area in the SmFe7 film was identified adjacent to the Ta layer. The bottoms of the SmFe7grains were V-shaped, suggesting that formation of the amorphous area began near the interface and proceeded to form a facet.

 

Auxiliary resources (full texts, presentations, posters, etc.)
  1. PRESENTATION: Epitaxial growth of SmFe_{7} films on Ta-buffered sapphire substrate using the RF magnetron sputtering method, PNG image data, 1701 x 980, 8-bit/color RGBA, non-interlaced, 0.1MB
 

Legal notice
  • Legal notice:
 

Presentation: Poster at 17th International Conference on Crystal Growth and Epitaxy - ICCGE-17, General Session 10, by Takeshi Kusumori
See On-line Journal of 17th International Conference on Crystal Growth and Epitaxy - ICCGE-17

Submitted: 2013-03-26 02:54
Revised:   2013-07-10 16:05