Thin and super thin TiCN system nanolayers are advanced materials for production of wear resistant  coatings for cutting tools, machine components and other instruments.

The service, mechanical and physical-mechanic properties of nano composite coatings are determined substantially by the surface and size effects and also by grain boundary effects.

X-ray investigations of thin nanosized Ti(Si)CN layers, deposited by PECVD technique , have been performed. To be deposited in various conditions nano composite coatings are characterized by four structure types such as  :nc-TiN, nc-TiN/a-SiCN nc-TiNC/nc-TiSi2/a-SiCN і nc-TiNC/nc-TiCl2/a-SiCN.  The presence of TiN and TiNC peaks have been revealed by X-ray  analyses.

 It was determined that  nanocrystalite sizes are about 10-20 nm. The values of nanohardness and elastic modulus are up to 31 GPa and 350 GPa correspondingly. It was determined that nanohardness of such coatings to be deposited on hard alloy and quick-cutting steel and silicon substrates raises from 10 % till 100 %.

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