Dynamic development of application of titanium and its alloys in modern automotive and aircraft industry, forces the necessity of finding new ways of improving mechanical and chemical properties of applied materials. One of the possibility is the diffusion hardening of titanium and its alloys by such elements as nitrogen, carbon and oxygen, most often in glow discharge processes.
The results of the X-ray analyses (diffraction, chemical microanalysis) and mechanical tests (microhardness) of diffusely hardened substrates of titanium and Ti6Al4V alloy are presented in this paper. The substrates underwent the process in plasma discharge in presence of oxygen and argon mixture, and after that the series of researches were conducted.
The X-ray diffraction was used to determine the phase composition of formed layers, X-ray microanalysis to determine the chemical composition changes of alloying components (aluminum and vanadium) and oxygen, in the surface layer. The microhardness distribution test was also done. The influence of chemical composition of the substrate, on the structure and mechanical properties and thickness of hardened layer, was evaluated.

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