Semiconductor nanoparticles have received much attention due to the quantum confinement effect and potential applications in the biological, electrical or photonic fields. As the luminescent nanoparticles are embedded in the supporting media, the semiconductor nanoparticles could be used widely in photonics research area.

The amorphous SiO₂ films filled with Si nanoparticles were prepared from SiO₂ sol and Si nanoparticles colloid. Si nanoparticles in the diameter of 2-5 nm were prepared from Zintl salt sodium silicide (NaSi) by solution routs. The surface-passivating ligand, chlorine, was replaced with hydroxyl group by the reaction of chlorine-capped Si nanoparticles with distilled water. The prepared water-soluble Si nanoparticles were dispersed to ethanol and incorporated into SiO₂ sol by hydrolysis of TEOS. The freshly prepared Si nanoparticle-sol mixture was spin-coated on Si subatrate. The substrates were annealed at 300, 400, 500, and 700 ^oC in a furnace under air.

The PL spectrum of colloidal Si nanoparticles covered a wide range 340-700 nm with a peak maximum near 420 nm upon 325 nm excitation. As for the nanocomposite thin films, the peak of PL was more blue-shifted and the intensity decreased with the higher annealing temperature, possibly due to the oxidation of Si nanoparticles into SiO₂. Some other optical and material analysis will be discussed.

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