Quartz crystal microbalances were used for label-free sensing since many years. Their disadvantage is their limited mass sensitivity if compared to optical decetion methods. Usually several thousand cells are needed to get an unequivocal result, e.g. in blood typing [1].

In this context, a nanoelectromechanical sensor system was developed [2], see also abstract by Oesterschulze et al. in the same symposium) which is designed for single cell analysis in liquids. As resonance element, silicon columns are used. The damping in liquid is greatly reduced because they are structured as 'pillars in trenches' so that only the surface of the pillar cap is in contact with liquid, resulting in a high quality factor.

For their utilization as biosensors, the pillar cap surface must be selectively coated. This can be realized by different silanization and lithographic processes which are in the focus of the presented work. In this context, the controlled immobilization of antibodies to the pillar surfaces will be shown. The rest of the surface  has to be coated with antisticking layers to avoid unspecific binding. First experiments in which the sensors are used in full blood will be shown, which show that only specific binding of blood cells to the pillar surfaces occurs.

[1] Ph.D. thesis F. Gehring, TU Kaiserslautern, 2006

[2] "Verfahren und Vorrichtung zur Detektion von Analyten in fluiden Medien", E. Oesterschulze, Ch. Ziegler, DE 10 2005 027 788

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1. Investigations of metallo-phthalocyanines grown on ferromagnetic Co((001) thin films.
2. Experimental and theoretical investigations of the electronic and magnetic coupling of iron and copper phthalocyanine to ferromagnetic Co(100) surfaces