Elastic Peak ElectronSpectroscopy (EPES) is a recent technique sensitive to the surface of the substrates. It based on elastic reflected primary electrons with energy E₀ fixed or variable.
The important parameter is the percentage of elastically reflected electron. The aperture and the position of the analyser are playing an important role.
Quantitative interpretation can be done with the help of a Monte-Carlo simulation programme called MSEP.
The information depth is changing with the primary energy, with the M-M EPES (multi modes) method one can analyse the surface overlayers of the sample. The knowledge of the value of the inelastic mean free path of electrons is crucial for interpretation.
We will present results on different metallic substrates showing the influence of the atomic number Z of the atoms of the samples.
Between other examples of applications the interface studies are of the first importance, we will shows EPES appplied on the first stages of Au/Al₂O₃ formation.

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1. Nitridation of InP(100) surfaces studied by synchrotron radiation