We demonstrate various applications of confocal Raman/fluorescence microscope integrated with Atomic Force Microscope (AFM). Firstly, we report on “classical” applications of such combination, where 2D AFM and confocal Raman maps are acquired simultaneously from the same part of the sample, but “independently” one from another. Physical characterization and modification capabilities of AFM merge with chemical resolution of confocal Raman microscope and general capabilities of optical microscope to provide complete information about sample investigated. We demonstrate results on various promising nanoelectronics materials: carbon nanotubes, semiconductor nanowires etc. Graphene flakes (a few monolayers of graphite) are studied. AFM topography and phase pictures combined with Raman spectroscopy of the same sample area allow one to distinguish flakes of different thickness (down to single layer flake) and analyze flake’s structural uniformity. Advanced AFM techniques such as Kelvin probe microscopy and Electrostatic force microscopy applied to the same flake give further insight into its physical properties.

The ultimate goal of integrating AFM with Raman/fluorescence spectroscopy is to break diffraction limit and to bring spatial resolution of optical methods down to resolution of AFM (a few nm). We will focus on the results of Tip Enhanced Raman Scattering (TERS) experiments – where Raman signal from narrow sample area below the metallized AFM tip is resonantly enhanced due to interaction with plasmons localized at the tip apex. The resulting resolution of 2D Raman mapping is about 60 nm that goes far beyond the optical diffraction limit. Different materials are studied: carbon nanotubes, dielectric films, C60 layers etc. Both etched gold wires and silver coated cantilevers are used for localized enhancement of electromagnetic field. Special emphasis is put on the difference between transmission (transparent samples) and reflection (opaque samples) TERS geometries.

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