Transparent amorphous oxide material has attracted tremendous attention since the first report of amorphous InGaZnO based TFT by Nomura et.al., in 2004. Unique features of transparent amorphous oxide material compared with conventional amorphous Si are their high performance, low process temperature and transparency. Here, we focus attention on the low process temperature of the amorphous oxide TFT and demonstrate the potentiality of transparent amorphous oxide TFT in flat panel display application.

Applicability of low process temperature is fully compatible with plastic substrates, which leads to flexible display. We demonstrate a flexible a-IGZO TFT array by sputtering technique onto PEN substrate at room temperature. Flexible TFT array was combined with Vizplex Imaging Film, which is a flexible frontplane of the electrophoretic display supplied by E Ink Corporation. 5.35 inch flexible electronic paper with high resolution of 150 ppi was successfully driven by a-IGZO TFT array.

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