MEMS are currently seeing significant market penetration in such areas as sensors for car air bags. Pick-off is typically achieved using piezoresistive elements to which electrical contact must be made. This presentation will demonstrate that the use of piezomagnetic materials in place of the piezoelectrics offers increased functionality. We coin the term MagMEMS for MEMS that contain magnetic components. The primary benefit of MagMEMS is that pick-off can now be by wireless techniques offering deployment in hostile or remore locations. Using simple structures, cantilevers and membranes, examples will be given of technology platforms. In exploring the benefits of piezomagnetic materials in MEMS the simplification to the whole sensor system will be discussed when the ΔE effect is used. This is the field dependence of Young's modulus that be be made to dominate the mechanical response of MagMEMS. Key materials for use in MagMEMS will also be discussed, along with some potential areas of commercial exploitation.

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