We have developed a method to fabricated metallic nanowires with a well controlled length and a diameter between 5 and 50 nm. At first, pure Al film was deposited on a low resistivity Si substrate, then it was anodically oxidized at a constant voltage in an oxalic acid of 0.3 M. A well ordered nanohole array (AAO: Aluminum Anodic oxide) was formed by this method, and we further enhanced regularity of nanoholes arrangement by the use of nano-imprinting prior to anodic oxidation.

 We formed Ag or Ni nanowires by DC pulse electroplating in AAO nanoholes. Metallic nanowires with an average diameter of 12 nm and 25 nm were obtained at anodic oxidation voltage of 10 and 20 V, respectively. One example of metal nanowires array formed within AAO nanoholes is shown in Fig.1, where polycrystalline Ni nanowire was formed in every hole. Metallic nanowires were separated each other by dissolving porous alumina matrix using NaOH solution. These nanowires are very promising materials for drug delivery or bio-molecular sensing, and further characterizations such as magnetic and SERS properties are in progress.

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