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SiC - Present Status and Material Challanges
|Peder Bergman , Liutauras Storasta , Carlsson Fredrik , Magnusson Björn , Jakobsson Henrik , Hallin Christer , Janzen Erik|
SiC is a material with properties of interest for high power and high frequency applications. The material quality including understanding and control of defects is however currently a limiting factor for many device applications. We will in this presentation discuss the current state-of-art of SiC for different applications, and the different material challanges in the form of material quality and reduction of defects.
Presentation: invited oral at E-MRS Fall Meeting 2003, Symposium A, by Peder Bergman
See On-line Journal of E-MRS Fall Meeting 2003
Submitted: 2003-06-18 20:52 Revised: 2009-06-08 12:55