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dr Johji Nishio

e-mail:
phone: +81-44-5492142
fax: +81-44-5201501
web:
interest(s):

Affiliation:


R D Partnership for Future Power Electronics Technology

address: Onogawa 16-1, Tsukuba, 305-8569, Japan
phone:
fax:
web:

Affiliation:


Toshiba Reserch and Development Center

address: 1, Komukai Toshiba-cho, Saiwaiku, Kawasaki, 212-8582, Japan
phone: +81-44-5492142
fax: +81-44-5201501
web: http://www.toshiba.co.jp

Participant:


17th International Conference on Crystal Growth and Epitaxy - ICCGE-17

began: 2013-08-11
ended: 2013-08-16
Presented:

17th International Conference on Crystal Growth and Epitaxy - ICCGE-17

C-face epitaxial growth of 4H-SiC on quasi-150mm-diameter wafers

Publications:


  1. C-face epitaxial growth of 4H-SiC on quasi-150mm-diameter wafers



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