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Investigating interdiffusion in Cu/Ni multilayers from x-ray diffraction and kinetic simulation

FengJu Gao 1,2,3Mohamed-Cherif Benoudia 1,2Jean-Marc Roussel 1,2Stephane Labat 1,2Olivier Thomas 1,2Dezső L. Beke 4Gábor Langer 4Miklós Kis Varga 4

1. Aix-Marseille Université, Institut Matériaux Microélectronique Nanosciences de Provence, Marseille 13397, France
2. CNRS, Faculté des Sciences et Techniques, Campus de St Jérome, Marseille 13397, France
3. Department of Materials Science and Engineering, Beijing Normal University, Avenue Xinjiekouwai 19, Beijing 100875, China
4. Department of Solid State Physics, L. Kossuth University, Debrecen H-4010, Hungary

Abstract

Epitaxial Cu/Ni multilayers are model systems for investigating the early stages (at the nm scale) of interdiffusion and mechanical stress. In this work we present a method that combines both atomistic simulations of the interdiffusion and x-ray diffraction experiments in this system. The aim of this approach is mainly to confirm (or not) the non-fickian interdiffusion mode that is expected in Cu/Ni multilayers. Indeed, due to the large asymmetry of the atomic mobility (Ni atoms diffuse faster in Cu regions than Cu atoms do in Ni ones), a layer-by-layer mode should be observed experimentally [1].
First, by using a one dimensional mean-field diffusion model, we report our simulation results for two extreme cases of diffusion asymmetry: the Fickian mode where the diffusion coefficient is constant (no asymmetry) and the layer-by-layer mode resulting from a strong concentration dependence of the diffusion coefficient. The theoretical angular shift of the spectra and the evolution of peak intensities are calculated for the two different kinetics. Signatures of the layer-by-layer mode are discussed.
Then, the x-ray diffraction experimental results are presented. The samples [Cu3.375 nm /Ni2.25nm] × 25 and [Cu3.521nm/Ni3.521nm] × 25 are made by magnetron sputtering on the MgO substrate and annealed at about 380°C for different time. The resulting experimental data show important trends. The multilayers are coherent and remain so after annealing. From the out of plane scans, we observed a significant change of the relative values of the peak intensity.
From these experimental evolutions of the peak intensities and with the help of our simulations, we attempt to identify the interdiffusion modes that take place in the CuNi multilayers.

Reference: [1] J. M. Roussel, P. Bellon, Phys. Rev. B 73, 085403 (2006).

 

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Related papers

Presentation: Oral at 11th European Powder Diffraction Conference, Microsymposium 2, by FengJu Gao
See On-line Journal of 11th European Powder Diffraction Conference

Submitted: 2008-05-22 16:20
Revised:   2009-06-07 00:48