Glass planar waveguides were fabricated by copper ion-exchange technique. Refractive index profiles caused by Cu⁺ and Cu²⁺ were determined by Inverse-WKB method and the calculation from the profile of the ion concentrations. The calculation results shows that the changes of refractive index near the region of surface in the glasses were caused by Cu⁺ and Cu²⁺ together, and the changes in the deep region of the glasses were caused by Cu^+. Cu²⁺ only contributed to the index changes in the region near the surface. The index profile calculated from the ion concentrations also appeared to be a quasi-gradient index profile, and when the ion-exchange process was carried out for more than 5 minutes, the samples measured by prism-coupling technique showed no modes, It could be caused by the decrease of the surface index of the waveguides. Both the out-diffusion of Cu⁺ and the stress release of Cu²⁺ caused by anneal contributed to the decrease of the surface index.

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