Ferromagnetic semiconductors can make full use of the spin degree of electron and provide bench for new ideas and new concepts. (Ga,Gd)As thin film is fabricated by mass-analyzed low energy ion beam epitaxy technique with Gd+ ion can provide much bigger magnetic momentum. There is no new phase found by X-ray diffraction (XRD) while the main substrate peaks broaden by Double-crystal X-ray diffraction (DC-XRD).

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