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- Wenke Weinreich
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Affiliation:
Fraunhofer Center Nanoelektronische Technologien
address:
, Dresden, 01099,
Germany
phone:
fax:
web:
Affiliation:
Fraunhofer Center Nanoelectronic Technology
address:
Königsbrücker Straße 180, Dresden, 01099,
Germany
phone:
fax:
web:
Participant:
E-MRS Fall Meeting 2007
began:
2007-09-17
ended:
2007-11-30
Presented:
E-MRS Fall Meeting 2007
Thermal Stability of thin ALD ZrO
2
Layers as Dielectrics in Deep Trench DRAM Devices Annealed in N
2
and NH
3
Publications:
Thermal Stability of thin ALD ZrO
2
Layers as Dielectrics in Deep Trench DRAM Devices Annealed in N
2
and NH
3
Verification of Grain Boundaries in Annealed Thin ZrO
2
Films by Electrical AFM Technique
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