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- Wenke Weinreich

e-mail: ***@cnt.fraunhofer.de
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Affiliation:

Fraunhofer Center Nanoelektronische Technologien

address: , Dresden, 01099, Germany
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Affiliation:

Fraunhofer Center Nanoelectronic Technology

address: Königsbrücker Straße 180, Dresden, 01099, Germany
phone:
fax:
web:

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
Thermal Stability of thin ALD ZrO2 Layers as Dielectrics in Deep Trench DRAM Devices Annealed in N2 and NH3

Publications:
  1. Thermal Stability of thin ALD ZrO2 Layers as Dielectrics in Deep Trench DRAM Devices Annealed in N2 and NH3
  2. Verification of Grain Boundaries in Annealed Thin ZrO2 Films by Electrical AFM Technique



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