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dr Vincent Edon
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+33-16-9157384
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+33-16-9157844
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Affiliation:
Laboratoire de Physique des Gaz et des Plasmas
address:
Bât. 210 Université Paris-Sud, Orsay, 91405,
France
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Publications:
Investigation of lanthanum and hafnium-based dielectric films by X-ray reflectivity, spectroscopic ellipsometry and X-ray photoelectron spectroscopy
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