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- Eva Tois |
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Affiliation: |
ASM Microchemistry|
| address: | Väinö Auerin katu 12 A, Helsinki, 00560, Finland | | phone: | | | fax: | +358-9-52554600 | | web: | | |
Participant: |
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Publications: |
- Low Temperature Deposition of Tantalum Carbide
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