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- Aivar Tarre
e-mail: | |
phone: | +372-7-374614 |
fax: | +372-7-383033 |
web: | |
interest(s): | atomic layer deposition, metal oxides, thin films, semiconductor gas sensors |
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Affiliation: |
Institute of Physics, University of Tartu
address: | Riia str. 142, Tartu, 51014, Estonia | phone: | | fax: | | web: | | |
Participant: |
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Publications: |
- ALD of Cr2O3 on sapphire
- Raman characterization of strain in epitaxial Cr2O3 films on sapphire
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