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Sonia De Angelis |
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Affiliation: |
Dipartimento di Fisica, Politecnico di Torino|
| address: | corso Duca degli Abruzzi, 24, Torino, 10129, Italy | | phone: | 0039 011 5647349 | | fax: | 0039 011 5647399 | | web: | | |
Affiliation: |
ETC srl|
| address: | Z.I. Pantano D’Arci, Catania, 95030, Italy | | phone: | +39095523242 | | fax: | +39095533241 | | web: | | |
Affiliation: |
Material and Microsystems Laboratori-χ Lab|
| address: | Palazzo “L.EINAUDI”, Lungo Piazza d’Armi, Chivasso, , Italy | | phone: | | | fax: | | | web: | | |
Participant: |
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Publications: |
IN SITU ETCHING TREATMENTS OF EPITAXIAL LAYER BY USING DIFFERENT GAS COMPOSITION FOR MORPHOLOGICAL QUALITY IMPROVEMENT OF THE SURFACES.
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